藤田 博之(東京大学生産技術研究所):電気学会論文誌Ｅ（センサ・マイクロマシン準部門誌）Vol. 125 (2005) , No. 11 pp.437-443
Besides rapid commercialization, MEMS is contributing to expand scientific frontiers in nano-scale and bio technology. This paper first discuses how to combine MEMS technologies with bottom-up nano technologies in order to establish the scientific foundation and to construct engineered nano systems. ＞＞ J-Stage＞JOI JST.JSTAGE/ieejsmas/125.437
Besides rapid commercialization, MEMS is contributing to expand scientific frontiers in nano-scale and bio technology. This paper first discuses how to combine MEMS technologies with bottom-up nano technologies in order to establish the scientific foundation and to construct engineered nano systems. ＞＞ J-Stage＞JOI JST.JSTAGE/ieejsmas/125.437
