US9909873
The sensor mass 3 is arranged on a substrate (not shown) via flexural springs 4 and anchoring devices 5. The flexural springs 4 are flexurally compliant in a direction transverse to their longitudinal extension. In their longitudinal extension, however, they are stiff. This causes the sensor mass 3 to be rotatable about an x axis(*x軸;不定冠詞)and a y axis(*y軸;不定冠詞)lying within the plane of projection, as well as about a z axis(*z軸;不定冠詞)emanating from the plane of projection. The oscillating rotary movements are represented by corresponding arrows.
US9566744
1. A robotic system for positioning along an x-axis, a y-axis, and a z-axis in three-dimensional space, the robotic system comprising:
a controller;
a tool;
an x-positioning system including a first drive motor, a first drive gear, and a first mechanical system, the first drive motor releasably coupled to the first drive gear when in a first position and responsive to signals from the controller to rotate the first drive gear in the first position, and the first mechanical system coupled to the first drive gear and configured to respond to rotation of the first drive gear by moving the tool along an x-axis(*x軸;不定冠詞);
a y-positioning system including a second drive motor, a second drive gear, and a second mechanical system, the second drive motor responsive to signals from the controller to rotate the second drive gear, and the second mechanical system coupled to the second drive gear and configured to respond to rotation of the second drive gear by moving the tool along a y-axis(*y軸;不定冠詞);
a z-positioning system including a gear assembly aligned for engagement with the first drive motor; and
a toggle engaged with the first drive motor, the toggle including a control for switching the first drive motor from the first position to a second position where it is decoupled from the first drive gear and coupled to the gear assembly of the z-positioning system, the gear assembly responsive to movement of the first drive motor to move the tool along a z-axis(*z軸;不定冠詞)when the first drive motor is in the second position.
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