WO2016057524
[0035] FIG. 1 includes a schematic illustration of a cleaning system 100 that may be used to clean microelectronic substrates using aerosol sprays or gas cluster jet (GCJ) sprays and
【0020】
図1には、クリーニングシステム100の概略的な説明図を示す。クリーニングシステム100は、エアロゾルスプレーまたはガスクラスタージェット(GCJ)スプレーを用いた、マイクロ電子基板のクリーニングに使用される。
a cross section illustration 102 of the process chamber 104 where the cleaning takes place.
また図1には、クリーニングが行われる処理チャンバ104の断面図102を示す。
The aerosol spray or GCJ spray may be formed by expanding cryogenically cooled fluid mixtures into a sub-atmospheric environment in the process chamber 104.
エアロゾルスプレーまたはGCJスプレーは、処理チャンバ104内で、極低温に冷却された流体混合物をサブ大気圧環境に膨脹させることにより形成される。
As shown in FIG. 1 , one or more fluid sources 106 may provide pressurized fluid(s) to a cryogenic cooling system 108 prior to being expanded through a nozzle 1 10 in the process chamber 102.
図1に示すように、1または2以上の流体源106は、処理チャンバ102内で加圧流体がノズル110を介して膨脹する前に、極低温冷却システム108に加圧流体を提供する。
The vacuum system 1 12 may be used to maintain the sub atmospheric environment in the process chamber 104 and to remove the fluid mixture as needed.
真空システム112は、処理チャンバ104でのサブ大気環境を維持し、必要に応じて、流体混合物を除去するために使用される。
[0063] A cryogenic aerosol spray may be formed with a fluid or fluid mixture being subjected to cryogenic temperatures at or near the liquefying temperature of at least one of the fluids and then expanding the fluid mixture through the nozzle 1 10 into a low pressure environment in the process chamber 104.
【0047】
極低温エアロゾルスプレーは、少なくとも一つの流体の液化温度、またはその近傍の極低温に晒された流体または流体混合物で形成され、次に、流体混合物は、ノズル110を介して、低圧環境の処理チャンバ104において膨脹する。
The expansion conditions and the composition of the fluid mixture may have a role in forming small liquid droplets and/or solid particles which comprise the aerosol spray that may impinge the substrate 1 18.
流体混合物の膨脹条件および組成は、微細な液滴および/または固体粒子の形成に重要であり、これらは、基板118に衝突するエアロゾルスプレーを含む。
The aerosol spray may be used to dislodge microelectronic substrate 1 18 contaminants (e.g., particles) by imparting sufficient energy from the aerosol spray (e.g., droplets, solid particles) to overcome the adhesive forces between the contaminants and the microelectronic substrate 1 18.
エアロゾルスプレーを使用して、エアロゾルスプレー(例えば液滴、固体粒子)から、汚染物質とマイクロ電子基板118の間の接着力を超える十分なエネルギーを衝突させることにより、マイクロ電子基板118の汚染物質(例えば粒子)を除去してもよい。
The momentum of the aerosol spray may play an important role in removing particles based, at least in part, on the amount of energy that may be needed to the aforementioned adhesive forces.
エアロゾルスプレーのモーメントは、少なくとも一部が前述の接着力のために必要なエネルギーの量に基づき、粒子の除去に重要な役割を果たす。
The particle removal efficiency may be optimized by producing cryogenic aerosols that may have components (e.g., droplets, crystals, etc.) of varying mass and/ or velocity.
粒子の除去効率は、質量および/または速度が変化する成分(例えば液滴、結晶など)を有する、極低温エアロゾルの形成により最適化される。汚染物質の除去に必要なモーメントは、質量および速度の関数である。
The momentum needed to dislodge the contaminants is a function of mass and velocity. The mass and velocity may be very important to overcome the strong adhesive forces between the particle and the surface of the substrate, particularly when the particle may be very small (
質量および速度は、粒子と基板表面の間の強力な接着力に打ち勝つため、極めて重要であり、特に、粒子が極めて小さい場合(100nm未満)、重要である。
US10856402
RF cavities are used to accelerate groups of charged particles towards a target. For many applications, the benefits of using cavities with superconducting internal surfaces outweigh the increased costs associated with cooling the cavities to cryogenic temperatures. The cavities are judged by their quality factor and acceleration gradient.
【0002】
RFキャビティは、一群の荷電粒子をターゲットに向かって加速するために使用される。多くの用途において、超伝導内表面を有するキャビティを使用する利点は、キャビティを極低温に冷却することに関連して増加されたコストを上回る。キャビティは、品質係数と加速度勾配によって判断される。
Quality factor (Q0) gives the inverse of the amount of energy lost in each cycle of the system. High quality factors reduce operating costs by requiring less cryogenic cooling. The acceleration gradient of the cavity describes its ability to accelerate particles. Acceleration gradients for superconducting RF (SRF) cavities are usually given in millions of volts/meter.
品質係数(Q0)は、システムの各サイクルで失われるエネルギー量の逆数を表す。高い品質係数は、極低温冷却を少なくすることで運転コストを削減する。キャビティの加速勾配は、粒子を加速する能力を表す。超伝導RF(SRF)キャビティに対する加速勾配は、通常、数百万ボルト/メートルで与えられる。
Higher gradients require fewer cavities to run a system at the same accelerating field, reducing start-up and operating costs. However, higher gradients require higher internal fields, pushing the performance limits for the superconducting interior surfaces.
勾配が高くなれば、同じ加速場でシステムを運転するために必要とするキャビティが少なくなり、初期費用および運転費用が減少する。しかしながら、より高い勾配はより高い内部磁場を必要とし、超電導内表面の性能限界を押し上げる。
US6843065
Providing refrigeration at temperatures below −50 C has many important applications, especially in industrial manufacturing and test applications. This invention relates to refrigeration systems which provide refrigeration at temperatures between −50 C and −250 C. The temperatures encompassed in this range are variously referred to as low, ultra low and cryogenic. For purposes of this Patent the term “very low” or very low temperature(*極低温)will be used to mean(*定義)the temperature range of −50 C to −250 C.
In many manufacturing processes conducted under vacuum conditions, and for a variety of reasons, the heating of a system element is required. This heating process is known as a defrost cycle. The heating elevates the temperature of the manufacturing system, enabling parts of the system to be accessed and vented to atmosphere without causing condensation of moisture(*結露)in the air. The longer the overall defrost cycle and subsequent resumption of producing very low temperatures, the lower the throughput of the manufacturing system. Enabling a quick defrost and a quick resumption of the cooling of the cryosurface in the vacuum chamber is beneficial. What is needed is a way to increase the throughput of a vacuum process.
There are many vaccuum processes which have the need for such very low temperature cooling. The chief use is to provide water vapor cryopumping(*クライオポンプ動作)for vacuum systems. The very low temperature surface captures and holds water vapor molecules at a much higher rate than they are released. The net effect is to quickly and significantly lower the chamber's water vapor partial pressure. Another application involves thermal radiation shielding. In this application large panels are cooled to very low temperatures. These cooled panels intercept(*阻止、遮断)radiant heat from vacuum chamber surfaces and heaters. This can reduce the heat load on surfaces being cooled to lower temperatures than the panels. Yet another application is the removal of heat from objects being manufactured. In some cases the object is an aluminum disc for a computer hard drive, a silicon wafer for an integrated circuit, or the material for a flat panel display. In these cases the very low temperature provides a means for removing heat from these objects more rapidly than other means, even though the object's final temperature at the end of the process step may be higher than room temperature(*室温). Further, some applications involving, hard disc drive media, silicon wafers, or flat panel display material, involve the deposition of material onto these objects. In such cases heat is released from the object as a result of the deposition and this heat must be removed while maintaining the object within prescribed temperatures. Cooling a surface like a platen is the typical means of removing heat from such objects. In all these cases it is to be understood that the evaporator surface is where the refrigerant is removing heat from these customer applications when providing cooling at very low temperatures.
WO2020254040
[0002] A "low temperature” range, as used herein(*本明細書では;定義), refers to a cryogenic temperature(*極低温)range, which starts at or about 77 degrees Kelvin (K) or lower, and down to at least 1 millikelvin (0.001 K), and in some cases as low as practicable, e.g., to 0.000001 K using presently available technology. A "low temperature” is a temperature in the cryogenic temperature range. A semiconductor or superconductor device operating in a cryogenic temperature range is referred to herein as a low temperature device (LTD). Semiconducting device, and/or superconducting devices, produce heat when operating. LTDs operating in a cryogenic temperature range also produce heat while operating, but the heat removal poses unique challenges in low temperature operations.
[0003] Most devices operating at cryogenic temperatures rely on materials(*無冠詞複数)that exhibit superconducting properties at those temperatures. Most superconductors are not good thermal conductors. To be able to remove heat from a structure(*不定冠詞;ある具体例), a material(*不定冠詞;ある具体例)has to be a good thermal conductor. For a material to be regarded as a good thermal conductor, the material must exhibit at least a threshold level of thermal conductivity. For example, a thermal conductivity of greater than a 1 Watt/(centimeter*K) at 4 Kelvin, is an acceptable threshold level of good thermal conductivity according to the illustrative embodiments.
[0004] Thermalization(*熱化)of a structure is the process and apparatus to conduct heat to or from the structure.
US9163869
FIELD OF THE INVENTION
The invention is directed to tube picking mechanisms having a tube picking compartment maintained at an ultra-low temperature(*超低温), e.g. from about −50° C. to about −135° C. or at a cryogenic temperature(*極低温)(e.g., about −140° C. to −196° C.). The tube picking mechanisms are particularly well suited for use in an automated, ultra-low temperature or cryogenic storage and retrieval system used to store and retrieve biological and chemical samples.
BACKGROUND OF THE INVENTION
Storage of biological and chemical samples is becoming widespread(*広まりつつ、普及)in biotechnological and medical industries. Many of these samples must be stored at or below freezing temperatures. Generally speaking(*概して、一般的), a regular(*通常)freezer operates from about −5° C. to −20° C., an ultra-low temperature freezer operates from about −50° C. to about −90° C. (preferably at about −80° C.) and a cryogenic freezer operates from about −140° C. to −196° C. (boiling point of liquid nitrogen). For some applications, it is advantageous to store samples below about −120° C. For purposes of this patent application, the term “ultra-low temperature” shall mean temperatures below about −50° C. and above temperatures(*それ以上の温度)generally considered to be cryogenic(*極低温の定義).
Large automated sample storage and retrieval systems that store samples within one or more ultra-low temperature (e.g., −80° C.) or cryogenic (e.g., about −140° C. to −196° C.) freezer compartments are known. Biological samples stored in these systems are often contained in sealed plastic laboratory tubes or vials having a diameter of 3.5 mm or larger. Larger tubes are sometimes called vials in the art, but both are referred herein as tubes, storage tubes or sample storage tubes. The tubes or vials are typically held in storage racks having an array of tube receptacles, for example, 384, 96, 48 or 24 tubes and having openings in the bottom of the tube receptacles. In most cases, a two-dimensional barcode containing identifying information is adhered to(貼付、貼り付け、接着、付着)the bottom of the storage tube and is able to be read through openings in the bottom of the tube storage racks.
WO2003083353
[0041] The composite overwrap in a container according to this invention preferably provides the primary structural support for the operating loads. The composite overwrap is preferably a material system comprising high-performance fibers in a resin matrix capable of cryogenic temperature service. As used herein(*本明細書では;定義) "cryogenic temperature(*極低温)" means any temperature of about -62°C (-80°F) and colder. An example of such a resin is the CTD 525 epoxy cryogenic resin. Two classes of material systems have been designed for this invention.