ビーム径

US20140103582
"[0019] The engaging parameters of the controllable particle beam 102 for the purposes of opening up the hole 11 may include particle beam intensity, beam diameter, duration of the engaging, and possibly others."

US7321118
"Because the ion source used with the microscope disclosed herein can achieve sub-nanometer beam diameter, the microscope of the invention can achieve that which was previously possible only with an electron beam."

US7880151
"Next, as shown in FIG. 2, a focused ion beam using a high beam current with a correspondingly large beam size is used to mill rectangles 202 and 204, respectively in front of and behind the region of interest, leaving a thin vertical sample section, lamella 206, that includes a vertical cross section of the area of interest."

US6292503
"The lateral resolution can be about the electron beam size because of the small thin film specimen that has been formed, using the focused ion beam device."

beam diameterの方が多いかも。