昇降

WO2006020631
(Abstract)
"An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter（回転/昇降器）(704). The first end effector (706) can grasp a sheet element (59) and move it to a desired position within the test apparatus (10), while the rotator lifter (704) provides incremental adjustment of a theta angle of the sheet element (59) to allow automated mapping of an entire sheet element without the need for（要することなく）manual adjustment of the position of the sheet element. A second end effector (716) can be mounted opposite（対向）the first end effector (706) and can be used to automatically position the sheet element (59) within a sheet resistance testing module (718) located at an opposite end of the apparatus (10)."

US9236305
(Abstract)
"Laser and plasma etch wafer dicing where(便利なwhere) a mask is formed covering(～するように、～して形成) ICs formed on the wafer, as well as any bumps providing an interface to the ICs. The semiconductor wafer is coupled to a film frame by an adhesive film. The mask is patterned by laser scribing to provide a patterned mask with gaps. The laser scribing exposes regions of the semiconductor wafer, below thin film layers from which the ICs are formed. The semiconductor wafer is plasma etched through the gaps in the patterned mask while the film frame is maintained at an acceptably low temperature with a chamber shield ring configured to(～するように構成された状態で) sit beyond the wafer edge and cover the frame. The shield ring may be raised and lowered（昇降）, for example, on lifter pins to facilitate transfer of the wafer on frame."

US9108322
(Abstract)
"A system and method for monitoring forces on a substrate lifting apparatus（昇降装置）. The system includes a platen cartridge with a platen and a movable lifting（昇降）portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift（昇降）pins. A plurality of force sensing elements are associated with （対応）respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction."

US20090233449
"2. The etching system of claim 1, further including means for lowering and lifting（昇降）the semiconductor wafer or sample to and from the sample holder.

US2015027917
Abstract
"A pallet system (50 b) is formed from a pallet (10) and a plurality of panels (54 a, 54 b, 54 c, 54 t and 56). The pallet (10) has a base (12) configured to receive members of a lifting apparatus to enable lifting（昇降）of the pallet (10). The panels (54 a, 54 b, 54 c, 54 t and 56) are coupled to each other and the pallet (10) to enable the panels to be moved between a closed configuration and an open configuration. In the closed configuration the panels can surround and contain one or more articles on the pallet (10). In the open configuration one of the panels is positioned to provide an opening to enable transfer of an article through the opening onto or off of the pallet (10) in a direction substantially parallel to a plane of the pallet (10)."

"[0084] When it is desired to load articles onto or unload articles from the pallet system 50 the panel 56 can be moved by decoupling it from the sleeves 62 to thereby create the opening 60 and reconnected or engaged with the panel 54b by locating the fingers 66 in the sleeves 64. This can be performed by lifting（上昇）then lowering（下降）of the panel 56 relative to the other panels 54 in a plane of the panels."

US7636966
"15. A docking station for use with a hospital bed having a base frame, a set of casters coupled to the base frame, and a patient support deck supported above the base frame, the docking station comprising: a column, a docking port coupled to the column and coupleable to（結合可能）the hospital bed the docking port being configured（構成）for delivery of at least one of（少なくとも１つの）a video service, an audio service, a data service, a communication service, a power service, a medical gas service, a vacuum service, a hydraulic service, or （選択肢のor）a pressurized air service to the hospital bed through the base frame while the casters of the base frame of the hospital bed remain supported by an underlying floor, and a patient table coupled to the column above the docking port.

16. The docking station of claim 15, wherein the patient table is raisable and lowerable（昇降可能）relative to the column."