Technical data including the latest spray technology method are available here for thin film coating formation of less than 10μｍ.
https://www.ipros.jp/catalog/detail/249163?hub=60+4343178&lipi=urn%3Ali%3Apage%3Ad_flagship3_detail_base%3Bxe%2BBt2ocR9KTq3aP6HjPUw%3D%3D
