FSCC06マイクロ静電スプレイによるパターンレジスト塗布における開口穴断面→膜厚の平均化、エッジ部の成膜は抜群！！ （Open hole coating state of pattern resist material by FSCC06 micro electrostatic spray system
Excellent uniformity of film thickness and film formation on edges! ！）
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